TECHNICAL BULLETIN

OPAQUE QUARTZ HEAT SHIELD COMPONENTS
REDUCE ELECTRICAL POWER COSTS,
IMPROVE THERMAL PROFILES,
PROTECT O-RING SEALS

 

Recent tests conducted at SEMATECH confirmed the long-held belief that using true opaque (not sandblasted) quartz provides a number of operational and economic benefits to semiconductor manufacturers.

Baseline data was established using an SVG Thermco VTR 7000 oxidation furnace at temperatures ranging from 600°C-1000°C.  The furnace was then re-fitted with a NitroSil® dome in place of the conventional clear quartz dome which is standard on the furnace.  No furnace modifications were required to attach the NitroSil dome.  Further, it is estimated that 25% less energy was required to attach the NitroSil dome to the furnace compared with fabricating and attaching a clear quartz dome.

Two additional furnace runs were then made under the same conditions.  For all three cases, power output was recorded at four temperature levels and at three furnace locations. The results clearly showed that 7% less energy was required to achieve the same temperature profiles. Just think of the savings you can enjoy with every furnace run!

NitroSil high purity fused quartz is available in a variety of shapes and sizes, including coil covers for Gemini epitaxial reactors, domes and rings for horizontal and vertical furnaces, pedestals for vertical furnaces, bell jars, and discs.

This information is not to be taken as a warranty or representation for which we assume legal responsibility nor as permission or recommendation to practice any patented invention without a license.  It is offered solely for your consideration, investigation and verification.
August, 1997

 

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